Comparison ledger
Disco 321, Disco DFD 6240 Automatic Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 321Disco | |
|---|---|---|
| OEM | Disco | Disco |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco 321 | Disco DFD |
| Specifications | ||
| OEM | Disco[1] | Disco[4] |
| Model | 321[1] | DFD 6240[4] |
| Equipment type | Wafer Dicing Saw[1] | — |
| Facility context | Cleanroom Instrumentation[1] | — |
| Application area | Nano and Micro Fabrication[1] | — |
| Location | FNT 4.106[1] | — |
| Wafer Size | Up to 6 inches[2] | — |
| Spindle Power | 1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3] | — |
| Spindle Power (alternate) | 1500 Watt spindle[2] | — |
| Non-Contact Setup | Non Contact Setup[3] | — |
| Microscope | Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3] | — |
| Broken Blade Detection | Broken Blade Detection[3] | — |
| Light Tower | Includes Light Tower[3] | — |
| Chuck Type | 6" Universal Chuck (or 6" Porous Film Frame Chuck)[2] | — |
| Wafer size capability | Up to 6" wafers[3] | — |
| Chuck | 6-inch porous film frame chuck[2] | — |
| Spindle power | 1500-watt spindle[2] | — |
| Footprint | Small footprint[2] | — |
| Setup | Non-contact setup[3] | — |
| Blade break detection | Broken blade detection[3] | — |
| Other features | Floppy drive, light tower, blade tools, manuals[3] | — |
| Configuration | — | Single Spindle (1.2KW)[4] |
| Phase | — | 3 Phase[4] |
| Machine type | — | Automatic dicing saw[5] |
| Power | — | 3 Phase[5] |
| Frequency | — | 50/60 Hz[5] |
| Blade hub type | — | Disco ZH05 Blade Hub Type[4] |
| Blade breakage detector | — | BBD[4] |
| Non-contact setup | — | NCS[4] |
| Chuck table | — | 8" porous chuck table, default setting[4] |
| Spinner table | — | 8" spinner table, default setting[4] |
| Cleaning | — | Cleaning by atomizing nozzle[4] |
| Rinse cleaning | — | Rinse cleaning spec[4] |
| Angle recognition | — | Angle Recognition System[4] |
| Alignment | — | Kerf Center Alignment[4] |
| Fan | — | Duct fan[4] |
| Electrical | — | 3 Wire + Ground, 380 - 415 Vac[5] |
| Vintage | — | 2005 Vintage[4] |
Plan your fab
Building a Dicing & Grinding process? Get a complete equipment list.
Open the fab equipment planner →