Comparison ledger
Denton Vacuum Integrity-20, Denton Vacuum Integrity-29, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Integrity-20Denton Vacuum | Integrity-29Denton Vacuum |
|---|---|---|
| OEM | Denton Vacuum | Denton Vacuum |
| Category | Ophthalmic coating system | Ophthalmic coating system |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | Windows based | — |
| Generation | — | — |
| Family | Denton Vacuum Integrity-20 | Denton Vacuum Integrity-29 |
| Cited variants |
| — |
| Specifications | ||
| Model | Integrity-20[1] | — |
| System type | Ophthalmic AR coating system[1] | — |
| Positioning | Compact, economical, easy to operate[1] | — |
| Automation | Touch and Coat Automation[1] | — |
| Control software | Windows-based operating software[1] | — |
| Deposition method | Ion-Assisted Deposition[1] | — |
| Process | Glareban AR coating process[1] | — |
| Fixturing | Fast-Flip fixturing[1] | — |
| Coating chamber size | 20" x 24" x 28"[1] | — |
| Deposition source capacity | 16 lenses (70 mm uncut lens)[1] | — |
| Cycle time | 48 min./Both sides[1] | — |
| System size | 48" x 77" x 30"[1] | — |
| Vacuum chamber material | — | 304 stainless steel[2] |
| Vacuum chamber dimensions | — | 29 in wide x 29 in deep x 32 in high[2] |
| Vacuum chamber door | — | Full-width front door with two-point articulating hinges and Viton O-ring seal[2] |
| System cabinets | — | Two stand-alone NEMA 12 enclosures[2] |
| Pumping system | — | APD-10SC cryogenic pump with APD Displex water-cooled compressor and Alcatel 2063 two-stage rotary vane mechanical pump[2] |
| Additional vacuum cooling | — | Polycold PFC330ST cryogenic cooler[2] |
| Vacuum gauging controller | — | Granville-Phillips GP307 ionization/convectron gauge controller[2] |
| Process gas control | — | Two MKS 2179 mass flow controllers, each capable of 0-100 sccm in fixed flow mode[2] |
| Substrate rotation | — | Direct drive, single rotation fixture with bearing-supported feedthrough and 1.0 in diameter shaft[2] |
| Substrate heater | — | One 3 kW radiant quartz heater assembly[2] |
| Ion source | — | Denton Vacuum CC-105 cold cathode ion source[2] |
| Electron beam evaporation source | — | TFI-Telemark TFI-261-06 six-pocket rotary crucible electron beam source[2] |
| Electron beam power supply | — | TFI-Telemark ST-4 4.0 kW electron beam gun power supply[2] |
| Low voltage resistance source power supply | — | Denton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[2] |
| Deposition controller | — | Inficon XTC/2 quartz crystal controller with single crystal sensor[2] |
| System computer | — | Hewlett Packard Vectra PC with 586 microprocessor and 17 in SVGA monitor[2] |
| Control software interface | — | GE Cimplicity software via RS-485 interface to a GE Fanuc 9030 PLC[2] |
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