Comparison ledger
Chroma 7940, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 7940Chroma | |
|---|---|---|
| OEM | Chroma | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Grip Ring Holder or Wafer frame | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Chroma 7940 | KLA .204 PSL Wafer |
| Specifications | ||
| Wafer size | Grip Ring Holder or Wafer frame[1] | — |
| Inspection Area | Max 8" for 6" expanding wafer[1] | — |
| Chip Size | 1.2mm x 1.2mm - 3.1mm x 3.1 mm[1] | — |
| DUT Package | VCSEL[1] | — |
| Configuration | 25M Color CMOS Camera (top side)[1] | NIST Traceable[4] |
| 2X | 1.28um/pixel (Resolution)[1] | — |
| 5X | 0.51um/pixel (Resolution)[1] | — |
| Chip Size Range | 1.2mm x 1.2mm - 3.1mm x 3.1mm[1] | — |
| Camera | 25M Color CMOS Camera (top side)[1] | — |
| Light Source | LED Co-Axis Lighting , Ring Lighting , Back Lighting[1] | — |
| Objective Lens (programmable) | 2X: 1.28um/pixel (Resolution); 5X: 0.51um/pixel (Resolution)[1] | — |
| Auto Focus (correct warpage) | Yes[1] | — |
| Auto Rotation | Yes[1] | — |
| Edge Detection | Yes (incomplete wafers)[1] | — |
| Auto Cassette Load ports | Yes[1] | — |
| Customized Algorithm Capability | Yes[1] | — |
| Industrial Computer | i7 / 32GB RAM / 2TB HD or better[1] | — |
| Defect Detection Rate | >98%[2] | — |
| Wafer Inspection Time | up to 6" wafer in 3 minutes[3] | — |
| Throughput | up to 15 msec./chip[3] | — |
| Resolution | 2X: 1.3μm/pixel; 5X: 0.5μm/pixel[3] | — |
| Minimum Detectable Defect Size | 1.5μm[3] | — |
| Magnifications | 2X and 5X[3] | — |
| Top Side Camera | 25M Color CMOS Camera[1] | — |
| Bottom Side Camera | 25M Color CMOS Camera[1] | — |
| Objective Lens (programmable) 2X | 1.28um/pixel (Resolution)[1] | — |
| Objective Lens (programmable) 5X | 0.51um/pixel (Resolution)[1] | — |
| Edge Detection (incomplete wafers) | Yes[1] | — |
| Wafer Size | — | 8 inch[4] |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[4] |
| NIST Traceable | — | Yes[4] |
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