Comparison ledger
Brooks 017-0146-01 Prealigner, Perkin Elmer Micralign, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | MicralignPerkin Elmer |
|---|---|---|
| OEM | Brooks | Perkin Elmer |
| Category | Lithography | Lithography |
| Wafer size | — | 2-inch, 2.5-inch, or 3-inch wafers; optionally 4×4-inch, 3.5×3.5-inch, or 3×3-inch masks |
| Process node | — | — |
| Introduced | — | 1973 |
| Production run | — | 1971–1990 |
| Lifecycle | — | Discontinued |
| Lifecycle milestones | — | 1990 Divestiture |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Perkin Elmer Micralign |
| Cited variants | — | |
| Specifications | ||
| OEM | — | Perkin-Elmer[1] |
| Model family | — | Micralign[1] |
| Type | — | projection aligner[1] |
| Introduction year | — | 1973[1] |
| First sold model | — | Micralign 100[1] |
| First sold | — | 1973[1] |
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