Waferpedia

Comparison ledger

017-0024-01 PrealignerversusNSR 2005 i 10 i-Line

Brooks 017-0024-01 Prealigner, Nikon NSR 2005 i 10 i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
NSR 2005 i 10 i-LineNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerNikon NSR 2005 i 10 i-Line
Specifications
OEM—Nikon[1]
Model—NSR 2005 i 10[1]
Tool type—i-line stepper[1]
Category—Lithography[2]
017-0024-01 Prealigner entryNSR 2005 i 10 i-Line entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Lithography process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com