Waferpedia

Comparison ledger

0 V 500versusLCD1-16NV-3

Blue M 0 V 500, Despatch LCD1-16NV-3, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
LCD1-16NV-3Despatch
OEMBlue MDespatch
CategoryThermal / DiffusionThermal / Diffusion
Wafer size—100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Despatch LCD1-16NV-3
Specifications
Equipment type—oven for polymer curing[1]
Intended use—Only for biocompatible devices[1]
Wafer carriers—100mm and 150mm wafers[1]
Piece parts—allowed[1]
Atmosphere—nitrogen circulation[1]
Filter—high efficiency particulate air filter[1]
Temperature monitoring—possibility to monitor temperature[1]
Maximum temperature—350°C[1]
Location—Zone 11[1]
Wafer sizes supported—100mm, 150mm[1]
Piece parts allowed—Yes[1]
Nitrogen circulation—Yes[1]
High efficiency particulate air filter—Yes[1]
Usage restriction—Biocompatible devices only[1]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch