Comparison ledger
Axcelis GSD 200 E 2 High Current, Varian Viision 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | GSD 200 E 2 High CurrentAxcelis | Viision 200Varian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1996– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis GSD 200 | Varian Viision 200 |
| Cited variants |
| |
| Specifications | ||
| Software Version | VM 8.0 (Virtual Machine)[1] | — |
| CIM | SECs[1] | — |
| Process | B11, BF2, As, P[1] | — |
| Handler System | Arm (Non HPES), In Air Handler[1] | — |
| Factory Interface | None[1] | — |
| Option System | Silicon Disk, SEF EGUN[1] | — |
| Configuration | Blade Server 120006095C Excluded[1] | Medium Current[2] |
| Process Species | B11, BF2, As, P[1] | — |
| Vintage | 2001[1] | 2000[3] |
| Disk Drive | Direct-Drive[6] | — |
| Dose Type | Regular[6] | — |
| Source Type | ELS4 IHC-Source without Vaporizer[6] | — |
| Main Workstation | SUN Solaris AXI 3HE (special case)[6] | — |
| Second Workstation | SUN Sparc5 on cart with printer[6] | — |
| CIM Interface | SECs[1] | — |
| Wafer Size | 8 inch[1] | — |
| High Voltage Transformer | both Oil/Light[6] | — |
| Tower Color | red/yellow/green; no buzzer[6] | — |
| Network | 24-port 100MB Ethernet with Cisco Router[6] | — |
| Kit Cell Controller | 177[6] | — |
| Options | Accel-Highvoltage Probe installed, HPES-Upgrade installed[6] | — |
| Phase | — | 3 Phase[3] |
| Wafer size | — | 8 inch (200 mm)[2] |
| Process type | — | Batch[5] |
| Current type | — | High Current[5] |
| Energy range (VIISion 200 PLUS2) | — | Up to 200 keV[5] |
| Energy range (VIISion 80LE) | — | 250 eV to 80 keV[5] |
| Electrical requirements | — | 3 Phase, 5 Wire, 208 V, 50/60 Hz[3] |
| Voltage | — | 208 Volt[3] |
| Frequency | — | 50/60 Hz[3] |
| Uptime | — | over 85%[5] |
| Equipment type | — | Ion implanter[2] |
| Model | — | Viision 200[2] |
| Current class | — | High current[5] |
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