Comparison ledger
Axcelis 200 ACU, Lam Research 4520, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | 4520Lam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research Rainbow 4520 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Parts Machine[2] | Envision Software[6] |
| Manufacturer | Axcelis[2] | — |
| Model | 200 ACU[2] | — |
| Tool type | Asher[2] | — |
| Wafer size | 200mm[4] | 200 mm[8] |
| Serial number | AU6A356AH[4] | — |
| Computer system | M 200 PC, M 200[5] | — |
| Part number | SC 4572 A[5] | — |
| Volts | 208[5] | — |
| Amps | 30[5] | — |
| Equipment type | Asher[2] | — |
| Wafer configuration | 8 inch[3] | — |
| Main Chamber | — | Top actuate clamping system[7] |
| Category | — | Etch[7] |
| Type | — | etcher[7] |
| System description | — | TCP oxide etch system[8] |
| Software | — | Envision 1.52[8] |
| Wafer handling | — | Hine cassette indexer load / unload[7] |
| Loadlock | — | Entrance loadlock[7] |
| System type | — | single wafer, vacuum load-locked low pressure oxide etch system[1] |
| Load / unload | — | Hine cassette indexer load / unload[7] |
| Remote panel | — | Remote AC Panel[7] |
| Endpoint | — | Monochrometer[8] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →