Comparison ledger
ASML TWINSCAN EXE:5000, Brooks 017-0024-01 Prealigner, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | |
|---|---|---|
| OEM | ASML | Brooks |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | 2023 | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2023 First delivery · 2023 First in new generation · 2025 Planned high-volume support | — |
| Control system | — | — |
| Generation | High NA | — |
| Family | ASML TWINSCAN EXE:5000 | Brooks 017-0024-01 Prealigner |
| Cited variants |
| — |
| Specifications | ||
| Light source wavelength | 13.5 nm[1] | — |
| Numerical aperture (NA) | 0.55[1] | — |
| Resolution | 8 nm[1] | — |
| Stage type | Dual-stage[1] | — |
| Technology generation | High NA EUV[1] | — |
| Technology | Extreme ultraviolet (EUV) lithography[1] | — |
| Platform | EXE (High NA EUV)[1] | — |
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