Comparison ledger
ASML PAS 5500 1150 C Wafer, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 150 e MaskSUSS MicroTec | |
|---|---|---|
| OEM | ASML | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML PAS 5500 | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Configuration | 2x2 cassette/transfer loader[1] | — |
| Wafer size | 8 inch[1] | — |
| Category | Lithography[2] | — |
| Laser system | Cymer NL7600A NanoLith laser system, 400V, 70A, mfg 2002[1] | — |
| Wafer loader | 2x2 cassette/transfer loader[1] | — |
| Mains power cabinet | Mains power cabinet[1] | — |
| Filtration unit | Donaldson P199100 LithoGuard filtration unit[1] | — |
| Exhaust blower | Rietschle Thomas SAH 55 (10) exhaust blower[1] | — |
| Exhaust blower cabinet | Rietschle Thomas REL 44050 (23) exhaust blower cabinet[1] | — |
| Uninterruptible power system | Quality Power Solutions uninterruptible power system w/ battery pack[1] | — |
| Power conditioner | Powervar ABC75.0-48D40Y 2000 Series GPI power conditioner, 75kVA[1] | — |
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