Comparison ledger
Applied Materials Reflexion LK, Lapmaster 15 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Reflexion LKApplied Materials | 15 LapperLapmaster |
|---|---|---|
| OEM | Applied Materials | Lapmaster |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Reflexion | Lapmaster 15 |
| Specifications | ||
| Configuration | Miniship[1] | Equipped with:[4] |
| Wafer size | 300 mm[3] | — |
| Removal rate | >6452 Å/min[3] | — |
| Non-uniformity | <4%[3] | — |
| Pressure | 1.5 psi[3] | — |
| Slurry flow rate | 300 ml/min[3] | — |
| Platen/Carrier rotary speed | 97/103 rpm[3] | — |
| Gas delivery | 300 ml/min[1] | — |
| Number Of Conditioning Rings | — | Up to 3[4] |
| Ring ID | — | Up to 5.5″[4] |
| Plate Diameter – Outside | — | 15″[4] |
| Plate Diameter – Inside | — | 3 1/2″[4] |
| Standard RPM | — | 60[4] |
| Drive Motor | — | 1/2 HP[4] |
| Electrics | — | 110V / 1Ph / 60Hz[4] |
| Dimensions – Approximate | — | 26″(L-R) x 21″(F-B) x 22″(H)[4] |
| Equipped with: 15″ Cast Iron Plate | — | Included[4] |
| Equipped with: (3) Yoke/Roller Bearing Assemblies | — | Included[4] |
| Equipped with: (3) Conditioning Rings | — | Included[4] |
| Equipped with: (3) Hold Downs | — | Included[4] |
| Equipped with: 30 Minute Timer | — | Included[4] |