Waferpedia

Comparison ledger

ReflexionversusAS 2000

Applied Materials Reflexion, SCREEN AS 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: CMP, null[1]
Side-by-side comparison of selected equipment models
Attribute
ReflexionApplied Materials
AS 2000SCREEN
OEMApplied MaterialsSCREEN
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials ReflexionSCREEN AS 2000
Cited variants
  • Reflexion LK[1]
  • Reflexion LK Prime[1]
—
Specifications
ConfigurationDielectric, LK Oxide[2]Dual brush and top side brush chambers, spin dry[5]
Wafer Sizes12 inch[2]—
Process TypeChemical Mechanical Polishing (CMP)[2]—
OEMApplied Materials[2]—
ModelReflexion[2]—
CategoryCMP (Chemical Mechanical Polisher)[2]—
Wafer Size12 inch[2]8 inch[7]
Gas—1:100 DHF, 1:100 NH4OH[5]
OS—Windows NT[5]
Power—0.750KVA transformer[6]
Missing—HLS cards / condition not well[6]
Brush Chambers—Dual brush and top side brush chambers[5]
Spin Dry—Yes[5]
Process Gases—1:100 DHF, 1:100 NH4OH[5]
Operating System—Windows NT[5]
Vintage Year (example unit)—1998[5]
Vintage Year (another unit)—1999[6]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]patents.google.compatents.google.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]Equipment inventory listing