Waferpedia

Comparison ledger

0041-39086 ESC PartversusFlex DS

Applied Materials 0041-39086 ESC Part, Lam Research Flex DS, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Flex DSLam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research Flex DS
Specifications
Configuration—With Equipment Front End Module (EFEM)[1]
Manufacturer—Lam Research[1]
Category—Etch[1]
Type—Etcher with EFEM[2]
Wafer Size—300mm (12 inch)[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]waferpedia.comwaferpedia.com