Waferpedia

Comparison ledger

0020 18698 PartversusSEC 600 E-Beam

Applied Materials 0020 18698 Part, CHA SEC 600 E-Beam, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18698 PartApplied Materials
OEMApplied MaterialsCHA
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18698 PartCHA SEC 600 E-Beam
Specifications
ConfigurationDial Cover, Side Local Match, Hdpcvd, Ul[1]With[2]
Type—E-Beam Evaporator[2]
Make—CHA[2]
Model—SEC 600[2]
Source Controller—MeiVac eVap Source Controller[2]
XY Sweep Control—MeiVac XY Sweep Control[2]
High Voltage Power Supply—MeiVac e-Vap CVS High Voltage Power Supply[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing