Comparison ledger
Applied Materials 0020 18455 Part, Varian 3118 10 E E-Beam, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0020 18455 PartApplied Materials | 3118 10 E E-BeamVarian |
|---|---|---|
| OEM | Applied Materials | Varian |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0020 18455 Part | Varian 3118 10 E E-Beam |
| Specifications | ||
| Configuration | Shaft,Rf In Local Match, Hdpcvd,Rev3[1] | Integrated System[2] |
| Chiller | — | Lamb UC 50/30, low temperature recirculating[2] |
| Power unit | — | ARCO Temescal, high voltage[2] |
| Sweep controller | — | Temescal CV 8, for beam positioning and deposition uniformity[2] |
| Optical monitor | — | DYN-Optics 580 D, real time film thickness and deposition control[2] |
| Included components | — | Vacuum pumps, chamber, mounting pieces[2] |
| System integration | — | Components mounted in standard racks[2] |
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