Waferpedia

Comparison ledger

0020 18455 PartversusAlpha 8 S Z LPCVD

Applied Materials 0020 18455 Part, Tokyo Electron Alpha 8 S Z LPCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
Alpha 8 S Z LPCVDTokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartTokyo Electron Alpha
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]—
Water Exposure—water marks inside and outside the unit[2]
Process Type—Low Pressure Chemical Vapor Deposition (LPCVD)[2]
Vintage—1996[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing