Comparison ledger
Applied Materials 0010 47763, Applied Materials Centura DPS Poly, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | Centura DPS PolyApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Applied Materials Centura DPS Poly |
| Cited variants | — |
|
| Specifications | ||
| Configuration | 2nd Source New[2] | — |
| Type | Monopolar Dual Heated[3] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[4] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[3] | — |
| Model | 0010-47763[2] | — |
| OEM | Applied Materials[2] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[3] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[3] | — |
| Quantity available (source) | 1[3] | — |
| Wafer Size | — | 6 inch[5] |
| Tool Type | — | Poly Etcher[5] |
| Plasma Source Type | — | Decoupled Plasma Source (DPS)[1] |
| RF Pulsing Frequency | — | 1 kHz to 5 kHz[1] |
| Chamber Coating Material | — | Alumina or Y2O3[1] |
| Supported Process Node | — | 28 nm[1] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →