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0010-22161 High EFF RF MatchversusNanospec 210

Applied Materials 0010-22161 High EFF RF Match, Onto Innovation Nanospec 210, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Nanospec 210Onto Innovation
OEMApplied MaterialsOnto Innovation
Category——
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Introduced——
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FamilyApplied Materials 0010-22161 High EFF RF MatchOnto Innovation Nanospec 210
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]Nanospec 210[5]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Thickness Range—100 to 500,000 angstroms[3]
Typical Measurement Time—2.5 seconds[3]
Spot Size (5x objective)—50 µm[3]
Spot Size (10x objective)—25 µm[3]
Spot Size (40x objective)—6.5 µm[3]
Resolution—100 angstroms[4]
Reproducibility—5Å ±5% depending on film type[3]
Film Types Measured—Oxide on Silicon, Nitride on Silicon, Negative Resist on Silicon, Polysilicon on Oxide, Negative Resist on Oxide, Nitride on Oxide, Polyimide on Silicon, Positive Resist on Silicon, Positive Resist on Oxide[3]
Reflectance Mode—Thick Films[3]
Manufacturer—Onto Innovation (formerly Nanometrics)[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]tech-semi.comtech-semi.com
  4. [4]jmind.comjmind.com
  5. [5]Equipment inventory listing