Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Nova 3090, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | 3090Nova |
|---|---|---|
| OEM | Applied Materials | Nova |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Nova 3090 |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | 3090[3] |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| OEM | — | Nova[3] |
| Category | — | CMP metrology system[4] |
| Wafer size | — | 300 mm[4] |
| Channel | — | single polarized channel[4] |
| Spectral range | — | Deep-UV to Near-IR[4] |
| Applications | — | Poly, STI, Tungsten plugs, Copper interconnect[4] |
| Measurement capabilities | — | solid areas, 2D structures, 3D shape characterization, thickness and shape of dielectric materials, low-K materials[4] |
| Process capability | — | high-end 65nm and 45nm CMP applications[4] |