Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, MKS DA07A, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | DA07AMKS |
|---|---|---|
| OEM | Applied Materials | MKS |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | MKS DA07A |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | — |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Full Scale Pressure Range | — | 1 to 1000 Torr (1.33×10² to 1.33×10⁵ Pa)[3] |
| Heating Options | — | Unheated, 45°C, 80°C, 100°C[3] |
| Communications | — | Analog output and EtherCAT[3] |
| Sensor Options | — | Standard or etch/fluorine/deposition friendly[3] |