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0010-22161 High EFF RF MatchversusHRS-600HS-20

Applied Materials 0010-22161 High EFF RF Match, Espec HRS-600HS-20, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEspec
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchEspec HRS-600HS-20
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]HRS-600HS-20[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Series—HRS rapid-rate thermal cycle chamber[3]
Temperature and humidity range—−70°C to +180°C / 20%rh to 98%rh[3]
Temperature rate of change—20°C/min[3]
Interior dimensions—1000×1000×600 mm[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]espec.co.jpespec.co.jp