Comparison ledger
Applied Materials 0010-21246 Part, KLA RS 100 Sheet Resistance Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-21246 PartApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | KLA RS 100 |
| Specifications | ||
| Configuration | — | Refurbished[1] |
| Make | — | KLA[2] |
| Model | — | RS 100[2] |
| Equipment name | — | KLA RS 100 Sheet Resistance Measurement System[2] |
| Wafer sizes | — | 4 inch, 6 inch, 8 inch, 12 inch[1] |
| 300 mm wafer manufacturing | — | Designed to meet production requirements for 300 mm wafer manufacturing[3] |
| Temperature compensation | — | Film-specific TCR correction for temperature variations during wafer measurement[3] |
| Edge performance | — | Measurement information up to 1 mm from the conductive film edge[3] |
| Control software | — | Windows NT[3] |