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Comparison ledger

0010-18024 Pyrometer Assemblyversus1540EsB

Applied Materials 0010-18024 Pyrometer Assembly, Zeiss 1540EsB, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1540EsBZeiss
OEMApplied MaterialsZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyZeiss 1540EsB
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
System type—FIB/SEM system[2]
Electron column—FESEM electron column[2]
Imaging resolution—resolution approaching the 2 nm range[2]
Ion column—Ga ion column[2]
Milling capability—allows for milling (sputtering) of materials from the sample[2]
Deposition materials—Pt, W, and SiOx[2]
Gas Injection System etch gases—XeF2 and H2O[2]
Detector options—multiple detector options for different imaging modes[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]cmdis.rpi.educmdis.rpi.edu