Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Axcelis MCU 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | MCU 200Axcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | — |
| Specifications | ||
| OEM | Applied Materials[1] | Axcelis[3] |
| Model | 0010-16392[1] | MCU 200[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Category | — | Etch[4] |
| Wafer sizes | — | 8 inch[3] |
| Description | — | stripper / asher[4] |
| Version | — | 200 mm[4] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →