Waferpedia

Comparison ledger

0010-16392 ESC AssemblyversusEnabler

Applied Materials 0010-16392 ESC Assembly, Applied Materials Enabler, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
EnablerApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2010 Vintage
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyApplied Materials Enabler
Cited variants—
  • Centura AP Enabler E5[1]
  • Centura AP Enabler FEOL-E5[2]
Specifications
OEMApplied Materials[3]—
Model0010-16392[3]Enabler[5]
TypeESC Assembly[3]—
Wafer Size300 mm[4]—
Electrode ConfigurationDual[4]—
Manufacturer—Applied Materials[5]
Category—Etcher[5]
Wafer size—12 inch[5]
Description—Dielectric etcher[1]
Process chambers—4[1]
Version—300 mm[1]
Configured wafer size—300 mm[6]
Process—OX[6]
Software revision—B2.8_79[6]
FI software—FB4.70_12[6]
GEM software—7.20_17[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]Equipment inventory listing
  4. [4]spwindustrial.comspwindustrial.com
  5. [5]Equipment inventory listing
  6. [6]tarasemi.comtarasemi.com