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Comparison ledger

0010-14300 Magnet AssyversusNV GSD HE Ion

Applied Materials 0010-14300 Magnet Assy, Axcelis NV GSD HE Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-14300 Magnet AssyApplied Materials
OEMApplied MaterialsAxcelis
CategoryIon ImplantationIon Implantation
Wafer size—6"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-14300 Magnet AssyAxcelis NV GSD HE Ion
Specifications
ConfigurationP4 Magnet Assy, IMP[1]Refurbished in 2023[2]
Gearbox P/N0010-27417[1]—
Part Number0010-14300[1]—
DescriptionP4 Magnet Assy, IMP[1]—
Wafer size—6" Wafer Handling Station Installed[2]
Frequency—60 Hz[3]
Phase—3 phase[3]
Full Load Current—99 A[2]
Power—82 kVA[2]
Input Breaker—150 A[2]
Amp Rating Largest Load—99 A[3]
Max Interrupt Capacity—14 kA[2]
Beam Exhaust—1 MeV[3]
Beam Current—1 mA[2]
Main Computer—Solaris, SW 5.3[2]
Main Monitor—LCD[2]
Second Computer—Solaris[2]
Second Monitor—LCD[2]
OEM—Axcelis[2]
Model—NV GSD HE[2]
Category—Ion Implantation[3]
Wafer Sizes—6, 8 inch[2]
Refurbished—2023[2]
Beam Handling—Notch[2]
Dummy Cassette—25[2]
Load Buffer—17[2]
Vacuum Cassette—17[2]
Beam Profile Oscilloscope—Included[2]
Wafer Handling Station Installed—6 inch[2]
Disk Type—ACLS 11003980[2]
Gyro & Angle - Type & Degree—Alpha & Beta, +/-11 degrees[2]
Rotary Driver—1200 rpm[2]
HV Power Supply—Hunting Hivolt[2]
HV Stack—Hunting Hivolt[2]
AMU—Buckley[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com