Comparison ledger
Applied Materials 0010-03485 Magnet Assy, SUSS MicroTec AS 8 Alta Spray, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03485 Magnet AssyApplied Materials | AS 8 Alta SpraySUSS MicroTec |
|---|---|---|
| OEM | Applied Materials | SUSS MicroTec |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-03485 Magnet Assy | SUSS MicroTec AS 8 |
| Specifications | ||
| Configuration | WP AL 300mm PVD[1] | With:[5] |
| OEM | Applied Materials[1] | — |
| Model | 0010-03485[1] | — |
| Description | MAGNET ASSY, WP AL 300MM PVD[2] | — |
| Process | PVD[3] | — |
| Wafer size | 300mm[4] | — |
| Version | Spares[4] | — |
| Part Number | 0010-03485[1] | — |
| Manufacturer | Applied Materials[1] | — |
| Process Type | PVD (Physical Vapor Deposition)[1] | — |
| Application (Material) | Aluminum (AL)[1] | — |
| Wafer Diameter (associated) | 300 mm[1] | — |
| Tool type | — | Manual spray coater for high topographies[6] |
| Substrate size | — | Up to 200 mm and square substrates up to 6 inch edge length[6] |
| Wafer sizes | — | 3, 4, 5, 6, 8 inch[5] |
| Spray coater description | — | Spray coater for 3-inch to 8-inch wafers[7] |
| Maximum substrate size | — | 8 inch[8] |
| Resist spray dispense system | — | High precision resist spray dispense system up to 30 CPS, Resist type[5] |
| Pre-wet dispense nozzle | — | Altaspray, bowl clean solvent type[5] |
| Pressure tank system | — | 10 L SS with coupling[5] |
| Substrate assembly | — | R6 Altaspray BSR ready[5] |
| Resist storage | — | Stainless steel (x2)[5] |
| Media storage | — | SS EX[5] |
| Waste canister | — | 10 L stainless steel[5] |
| Transformer | — | For manual tool[5] |
| Vintage | — | 2018[5] |
| Spray axis velocity | — | Up to 500 mm/s[6] |
| Acceleration | — | Up to 9 m/s²[6] |
| Z-axis adjustment range | — | Up to 45 mm[6] |
| Nozzle adjustment range | — | 67.5 mm to 107.5 mm[6] |
| Chuck rotation | — | Up to 1,000 rpm[6] |
| Nozzles | — | Dual spray nozzles and separate solvent nozzle[6] |
| Filter unit | — | Solvent[5] |
| Maximum rotation speed | — | Up to 1,000 rpm[6] |
| Manual | — | 2018[5] |