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0010-03485 Magnet AssyversusTurbovac 50 Turbo

Applied Materials 0010-03485 Magnet Assy, Leybold Turbovac 50 Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsLeybold
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyLeybold Turbovac 50 Turbo
Cited variants—
  • TURBOVAC 50 with DN 40 ISO-KF[1]
  • TURBOVAC 50 with DN 40 CF[1]
  • TURBOVAC 50 with DN 63 ISO-K[1]
  • TURBOVAC 50 with DN 63 CF[1]
  • TURBOVAC 50 D2[2]
Specifications
ConfigurationWP AL 300mm PVD[3]—
OEMApplied Materials[3]—
Model0010-03485[3]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[4]—
ProcessPVD[5]—
Wafer size300mm[6]—
VersionSpares[6]—
Part Number0010-03485[3]—
ManufacturerApplied Materials[3]—
Process TypePVD (Physical Vapor Deposition)[3]—
Application (Material)Aluminum (AL)[3]—
Wafer Diameter (associated)300 mm[3]—
Pump Type—Turbomolecular pump with grease-lubricated bearings[2]
Nominal rotation speed—72000 rpm[7]
Run-up time—2 min[7]
Ultimate pressure—< 5 x 10⁻⁸ mbar[7]
Weight—2.0 kg (4.4 lbs)[7]
Max. power consumption—45 W[7]
Power consumption at ultimate pressure—15 W[7]
Admissible ambient temperature—10 to 55 °C / 50 to 131 °F[7]
Cooling—Standard convection; optional air/water[7]
Max. foreline pressure for N₂—1 x 10⁻¹ mbar (7.5 x 10⁻² Torr)[7]
Recommended foreline pump—TRIVAC D 2.5 E[7]
Pumping speed for N₂ (DN 40 inlet)—33 l/s[7]
Pumping speed for N₂ (DN 63 inlet)—55 l/s[7]
Gas throughput for N₂ (DN 40 inlet)—0.90 mbar l/s[7]
Gas throughput for N₂ (DN 63 inlet)—1.00 mbar l/s[7]
Compression ratio for N₂—2 x 10⁶[7]
Compression ratio for He—5 x 10²[7]
Compression ratio for H₂—2 x 10²[7]
Sources (7)Every fact above is drawn from these public sources
  1. [1]ptbsales.comptbsales.com
  2. [2]manualslib.commanualslib.com
  3. [3]inventory listing
  4. [4]semistarcorp.comsemistarcorp.com
  5. [5]layla-ec.comlayla-ec.com
  6. [6]fabsurplus.comfabsurplus.com
  7. [7]uhvts.comuhvts.com