Waferpedia

Comparison ledger

0010-03485 Magnet Assyversus310

Applied Materials 0010-03485 Magnet Assy, EV Group 310, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
310EV Group
OEMApplied MaterialsEV Group
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system—unified GUI program platform called EVG CIMFramework
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyEV Group 310
Specifications
ConfigurationWP AL 300mm PVD[1]—
OEMApplied Materials[1]—
Model0010-03485[1]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Tool name—EVG 310[5]
Type—single wafer cleaner[5]
Cleaning function—megasonic DI water cleaner[5]
Modules—cleaning module (CLM) and pre-bond station and infrared lamp imaging module (IRM)[5]
Cleaning use—used to clean wafers[5]
Pre-bond use—used to put wafers in contact (prebond)[5]
Imaging use—used to image through the wafer stack with infrared illumination to look for bonding defects (voids)[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]epfl.chepfl.ch