Comparison ledger
Agilent E 500, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | E 500Agilent | 160 XP IonVarian |
|---|---|---|
| OEM | Agilent | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent E 500 | Varian 160 XP Ion |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Medium Current[2] | 150mm High Current IMP[4] |
| Manufacturer | Agilent[3] | — |
| Category | Ion Implantation[3] | — |
| Wafer size | 8 inch[2] | — |
| Type | Medium current ion implanter[3] | — |
| Vintage | 1996 vintage[2] | — |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →