Comparison ledger
ABM -407B-2-S-CE-S293 Robot, KLA Archer 10, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Archer 10KLA | |
|---|---|---|
| OEM | ABM | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | KLA Archer 10 |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | Archer 10[4] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Wafer Size | — | 200mm[3] |
| Wafer Handling | — | 200mm dual open wafer handler[3] |
| Measurement Technology | — | Coherence probe interference microscope[3] |
| Software | — | Windows NT based[3] |
| Integration Software | — | KLA Stepper Setup (KLASS) station integration software[3] |
| User Interface | — | 19-inch LCD screen[3] |
| Network | — | Network ready[3] |
| OEM | — | KLA[4] |
| Category | — | Metrology & Inspection[1] |
| Wafer handling | — | 200mm dual port open wafer handler[1] |
| Overlay measurement module | — | Fully automated overlay measurement module[3] |
| Optics | — | Coherence probe interference microscope[3] |
| Computer software | — | Windows NT based software and user interface[3] |
| Computer interface | — | Integrated user interface[3] |
| Display | — | 19" LCD screen[3] |
| Storage media | — | 3.5 inch floppy drive and CD ROM drive[3] |
| Connectivity | — | Network ready[3] |
| Communications | — | SEC's communication[3] |
| Software version | — | 5.6[1] |
| Computer upgrade | — | XP computer upgrade[1] |
| Computer | — | KLASS RS2 computer[1] |
| Configuration options | — | AMS, Digitizer, LINNIK, PDA, PZT-P-Z feedback[1] |