Comparison ledger
ABM -407B-2-S-CE-S293 Robot, ESI 5200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 5200ESI | |
|---|---|---|
| OEM | ABM | ESI |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | ESI 5200 |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Rep Rate Range (kHz) | — | 3-20[2] |
| Max Work Surface Power (W) | — | 1.9[2] |
| Pulse Width (ns) | — | 22+/-10 @3kHz, 35 @10kHz, 55+/-30 @18kH[2] |
| Repetition Rate Range | — | 3-20 kHz[2] |
| Max Work Surface Power | — | 1.9 W[2] |
| Pulse Width @3kHz | — | 22±10 ns[2] |
| Pulse Width @10kHz | — | 35 ns[2] |
| Pulse Width @18kHz | — | 55±30 ns[2] |
| Vintage | — | 1998[2] |