Waferpedia

Comparison ledger

-407B-2-S-CE-S293 RobotversusCDX 2000

ABM -407B-2-S-CE-S293 Robot, Comdel CDX 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
CDX 2000Comdel
OEMABMComdel
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyABM -407B-2-S-CE-S293 Robot—
Specifications
ModelABM-407B-2-S-CE-S293[1]—
DescriptionROBOT[1]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1]—
Output frequency (HF)—13.56 MHz (optional 2-60 MHz)[2]
Output frequency (LF)—400 kHz (optional 20-450 kHz)[2]
Output power (HF)—0-1000 W continuous forward power[2]
Output power (LF)—0-1000 W continuous forward power[2]
Input voltage—208 VAC three phase (187-229 V range)[2]
Operating temperature—+10 to +40 °C ambient[2]
Storage temperature—-25 to +70 °C[2]
Dry weight (max)—61.4 kg (135 lb)[2]
Linearity—+/- 3.0% deviation from 10% to 100% max output[2]
Rack mounting—Standard 19-inch EIA rack[2]
RF output connector—Type "N" female coaxial bulkhead[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]dealer listingsemistarcorp.com
  2. [2]manualslib.commanualslib.com