Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Balzers Pfeiffer TPU 240 Turbomolecular, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Balzers |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Balzers Pfeiffer TPU |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | TPU 240[3] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Volume Flow Rate | — | 230[3] |
| Manufacturer | — | Balzers Pfeiffer[3] |
| Part Number | — | PMP01330A[1] |
| Condition | — | Refurbished[1] |
| High-Vacuum Inlet Flange | — | DN 100 CF-F (6" ConFlat Fixed)[1] |
| Foreline / Exhaust Flange | — | DN 25 ISO-KF (NW25)[1] |
| Pumping Speed (N2) | — | 230 L/s[1] |
| Pumping Speed (He) | — | 240 L/s[1] |
| Pumping Speed (H2) | — | 210 L/s[1] |
| Compression Ratio (N2) | — | 1 × 10^8[1] |
| Ultimate Base Pressure | — | ≤ 1 × 10^-11 mbar (≤ 7.5 × 10^-12 Torr)[1] |
| Nominal Rotational Speed | — | 60,000 RPM[1] |
| Ramp-Up / Start Time | — | ≈ 1 to 3 minutes[1] |
| Cooling Method | — | Natural Convection / Forced Air / Water-Cooling (15 L/h at 15 °C)[1] |
| Lubricant Charge | — | 8 cm^3 F4 / F5 Operating Fluid Wick Compatible Controllers[1] |
| Weight | — | 9.0 kg (19.8 lbs)[1] |
| Equipment type | — | Turbomolecular pump[3] |
| Part number | — | PM P01 330 A (PMP01330A)[1] |
| Lubricant charge | — | 8 cm3 F4 / F5 operating fluid wick compatible[1] |
| Compatible controllers | — | Pfeiffer TCP 121 / TCP 380 / TCP 300 series[1] |
| Make | — | Balzers Pfeiffer[3] |
| Type of product | — | turbo pump[4] |
| Inlet | — | 6" conflat[4] |
| Exhaust | — | KF25[4] |
| Vent valve | — | fixed[4] |
| Pumping speed | — | 230 l/s (N2)[4] |
| Compression ratio | — | 10^8 (N2)[4] |
| Recommended controller | — | TCP-121, TCP-380[4] |
| Recommended backing pump | — | DUO 016B[4] |
| OEM | — | Balzers Pfeiffer[3] |
| Device type | — | Turbomolecular pump[3] |