Comparison ledger
ABM -407B-1-S-CES293 Robot, KLA Surfscan 6200 Refurbishment Services, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | KLA Surfscan 6200 |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Configuration | — | Refurbishment Only of Client System[2] |
| Machine type | — | Wafer surface contamination analysis system and laser particle detector for measuring defect densities on unpatterned wafers[3] |
| Illumination source | — | Argon-ion laser at 488 nm[3] |
| Detection sensitivity | — | Detection sensitivity down to 0.10 µm[3] |
| Defect detection capability | — | Locates, sizes, and counts defects in semiconductor substrate material down to 0.157 um at a 95% capture rate and down to 0.09 um at an 80% capture rate[4] |
| Scanning method | — | Laser beam scanning for detecting defect contamination[4] |
| Data display | — | Color-coded wafer maps, histograms, and summaries[4] |
| Substrate diameter | — | 125 mm[4] |
| Gain range | — | 1 to 8 (gain=1 corresponds to size 63 um or 250 um2; gain=8 corresponds to size 0.12 um or 0.005 um2)[4] |
| LPD count limit | — | 0 to 99999[4] |
| Throughput settings | — | High, medium, normal, low[4] |
| Detection mechanism | — | Laser beam illumination, scattered-light collection through an optics system, and photomultiplier tube (PMT) amplification[4] |
| Refurbishment service scope | — | Refurbishment only of client system[2] |
| Refurbishment laser | — | Solid state laser with 3 year warranty[2] |
| Refurbishment SBC | — | New/upgraded SBC replacing the old Trenton SBC[2] |
| Refurbishment storage | — | Solid state hard drive and solid state back up hard drive[2] |
| Refurbishment connectivity | — | USB 2.0 ready, new USB mouse, new USB keyboard[2] |
| Refurbishment warranty | — | 1 year parts warranty on system[2] |
| Refurbishment lead time | — | 12 to 16 weeks (depending on production schedule)[2] |