Comparison ledger
YES CV100PL, YES CV100PZ, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | CV100PLYES | CV100PZYES |
|---|---|---|
| OEM | YES | YES |
| Category | Single Wafer Resist Stripper | Single Wafer Resist Stripper |
| Wafer size | 2 to 6 in. | 6-8 in. (Auto Detect) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | YES CV100PL | YES CV100PZ |
| Cited variants | — | |
| Specifications | ||
| Model | YES-CV100PL - APS[2] | YES-CV100PZ[1] |
| Category | Single Wafer Resist Stripper[3] | — |
| Wafer size | 2 to 6 in.[2] | 6-8 in. (Auto Detect)[1] |
| Strip rate | up to 15,000 Å/min[2] | up to 20,000 Å/min[1] |
| Electron shift in 200Å gate oxide | < 10 mV[2] | — |
| Automation | fully automated; automatic, robotic, cassette-to-cassette loading[2] | — |
| Controller | touchscreen interfaced PLC controller[2] | — |
| Communication | RS232 communication standard[2] | — |
| End point detection | — | Patented Gas Swirl End Point Detection of Resist and Polymide Removal[1] |
| Controls | — | Mass Flow Controllers; PLC Control / Touchscreen Interface[1] |
Plan your fab
Building a Single Wafer Resist Stripper process? Get a complete equipment list.
Open the fab equipment planner →