Comparison ledger
Veeco Waferstorm M 3305 Lift Off, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000PYES | |
|---|---|---|
| OEM | Veeco | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | Robotic Wafer Handler: | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Veeco Waferstorm | YES 1000P |
| Cited variants |
| — |
| Specifications | ||
| Configuration | 300 Series[1] | Parallel plate[5] |
| Spin Chuck | 150 mm (Centrifugal Edge Grip)[1] | — |
| Voltage | 415 VAC[2] | — |
| Frequency | 50 Hz[2] | — |
| Phase | 3 Phase[2] | — |
| Wafer Size | 150 mm[1] | — |
| Power Requirements (Listing 1) | 415 VAC, 50 Hz, 3 Phase, 30 A[3] | — |
| Power Requirements (Listing 2) | 415 VAC, 50 Hz, 3 Phase[2] | — |
| Vintage (Listing 2) | 2010[2] | — |
| Vintage (Listing 3) | 2010[3] | — |
| Spin Chuck Type | 150 mm Centrifugal Edge Grip[1] | — |
| Cassette Loading | Qty 2 Horizontal Cassette Loading with 2 MCPs (8 total 150 mm Cassettes)[1] | — |
| Operating System | Windows 10[1] | — |
| SECS/GEM | Yes[1] | — |
| ESD Configuration | UPLA Filter with Air Ionizer Bar (Standard ESD Configuration)[1] | — |
| Fire Suppression | CO2 Fire Suppression System for 180" Frame: IR Detector, 120 Degrees Viewing Angle & Linear Heat Detector Wire[1] | — |
| Wafer size | Robotic Wafer Handler:[1] | — |
| Model | — | 1000P[4] |
| System type | — | Plasma cleaning system[4] |
| Shelf configuration | — | Four 16 x 16 inch shelves[4] |
| Total capacity | — | 1024 square inches[4] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
| Number of shelves | — | 4[4] |
| Shelf size | — | 16 x 16 inches[4] |
| Power | — | 1000 W[5] |
| Operation modes | — | Active, RIE, Downstream[4] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[4] |
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