Waferpedia

Comparison ledger

0332 F 9453 302 DiffusionversusHMDS1

Varian 0332 F 9453 302 Diffusion, YES HMDS1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMVarianYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVarian 0332 F 9453 302 DiffusionYES HMDS1
Specifications
Asset Number142841[1]—
Last Confirm DateOctober 14, 2025[2]—
Model—YES HMDS1[3]
Equipment type—Oven[4]
Section—Lithography[4]
Name as listed on equipment page—YES HMDS1 Oven[4]
Serial number—87297[3]
Tool owner—Brian Baker[3]
Tool designation—YES HMDS1[3]
Location—Bay C[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]fab-spares.comfab-spares.com
  3. [3]nanofab.utah.edunanofab.utah.edu
  4. [4]nanofab.utah.edunanofab.utah.edu