Comparison ledger
Varian 0216 7696, E 11368072 ESC, Varian EHPI E 220, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EHPI E 220Varian | |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0216 7696, E 11368072 ESC | Varian EHPI E 220 |
| Specifications | ||
| Configuration | Platen ADV-S Type[1] | Medium Current[3] |
| Type | ESC Platen ADV-S Type[1] | Cryopump on board 4 f[3] |
| Category | Ion Implantation[2] | Ion Implantation[4] |
| SMIF Interface | — | Varian Interface for Brooks SMIFS[3] |
| Line Voltage | — | 3 Phase, 208 V[3] |
| Line Frequency | — | 50 / 60 Hz[3] |
| UPS | — | CVCS[3] |
| Gas Box | — | 4 Sticks, HP and SDS 2 in use[3] |
| HE MFC Size | — | Optional[3] |
| Cassette Stage | — | 200 mm (8") Standard[3] |
| Wafer Mapping | — | Optical Sensor[3] |
| Lamp Colors | — | Red, Orange, Green[3] |
| Chiller | — | Heat Exchange[3] |
| DI Cart | — | EHPI with B-Pure Filters[3] |
| Make | — | Varian[3] |
| Model | — | EHPI E 220[3] |
| Wafer Sizes | — | 8 inch[3] |
| System description | — | 8-inch, medium-current system with a SMIF interface[4] |
| Vacuum | — | Cryopump on board 4 f[4] |
| Gas delivery | — | 4 Sticks, HP and SDS 2 in use[4] |
| Chambers | — | 2[3] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →