Comparison ledger
Ultratech 1000 Family, Ultratech Spectrum 3 (2244 i), side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | Spectrum 3 (2244 i)Ultratech |
|---|---|---|
| OEM | Ultratech | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Ultratech 1000 Family | Ultratech Spectrum 3 (2244 i) |
| Specifications | ||
| Tool type | Photolithography step-and-repeat 1X stepper[1] | — |
| Optical design | Wynne Dyson[1] | — |
| Magnification | 1X[1] | — |
| Configuration | — | for parts[2] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →