Comparison ledger
Tokyo Electron Expedius Plus, Veeco Waferstorm M 3305 Lift Off, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Expedius PlusTokyo Electron | |
|---|---|---|
| OEM | Tokyo Electron | Veeco |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | Robotic Wafer Handler: |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2007 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Expedius | Veeco Waferstorm |
| Cited variants | — |
|
| Specifications | ||
| Application | Pre-Diffusion Clean[2] | — |
| Bath-1 | SPM[2] | — |
| Operating | 110 - 150°C, H2SO4/H2O2 (3:1), circulation[2] | — |
| Chemical spiking | auto concentration feedback[2] | — |
| Bath Material | Quartz[2] | — |
| Bath-2 | QDR (hot)[2] | — |
| Megasonic | 950 kHz, 2400W (600*4)[2] | — |
| Bath-3 | APM[2] | — |
| Bath-4 | POU[2] | — |
| Bath-5 | HPM[2] | — |
| Bath-6 | QDR (hot)[2] | — |
| Dryer | SD2[2] | — |
| Configuration | Resistivity monitoring (Horiba)[2] | 300 Series[1] |
| OEM | Tokyo Electron[2] | — |
| Model | Expedius Plus[2] | — |
| Equipment type | Wet Bench[2] | — |
| Vintage | 2007[2] | — |
| Spin Chuck | — | 150 mm (Centrifugal Edge Grip)[1] |
| Voltage | — | 415 VAC[4] |
| Frequency | — | 50 Hz[4] |
| Phase | — | 3 Phase[4] |
| Wafer Size | — | 150 mm[1] |
| Power Requirements (Listing 1) | — | 415 VAC, 50 Hz, 3 Phase, 30 A[5] |
| Power Requirements (Listing 2) | — | 415 VAC, 50 Hz, 3 Phase[4] |
| Vintage (Listing 2) | — | 2010[4] |
| Vintage (Listing 3) | — | 2010[5] |
| Spin Chuck Type | — | 150 mm Centrifugal Edge Grip[1] |
| Cassette Loading | — | Qty 2 Horizontal Cassette Loading with 2 MCPs (8 total 150 mm Cassettes)[1] |
| Operating System | — | Windows 10[1] |
| SECS/GEM | — | Yes[1] |
| ESD Configuration | — | UPLA Filter with Air Ionizer Bar (Standard ESD Configuration)[1] |
| Fire Suppression | — | CO2 Fire Suppression System for 180" Frame: IR Detector, 120 Degrees Viewing Angle & Linear Heat Detector Wire[1] |
| Wafer size | — | Robotic Wafer Handler:[1] |
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