Comparison ledger
Tokyo Electron Alpha 8 SE, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 8 SETokyo Electron | |
|---|---|---|
| OEM | Tokyo Electron | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | Wafer I Cassette Handling | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | 2003– | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Alpha | Varian 0332 F 9453 302 Diffusion |
| Specifications | ||
| Process | High Temp Oxide (HCL, Ar)[1] | — |
| Configuration | 50/60 HZ[1] | — |
| Power | 4.0 kVA[1] | — |
| Maximum Full Load Current | 40 A[1] | — |
| Power AC | 100 V[1] | — |
| Overcurrent / Shortcircuit | 40 A[1] | — |
| Voltage | 208 V[7] | — |
| Phase | 3 Phase[7] | — |
| Software Version | 3.01 Rev. 003[7] | — |
| Handler System | Wafer Transfer Robot[7] | — |
| Main System | Well Drive[7] | — |
| Factory Interface | SMIF[7] | — |
| System Layout | Main, Utility | — |
| System Type | L Type | — |
| Side Maintenance | Installed | — |
| System Paint Color | Ivory | — |
| Furnace Front Surface Finish | Ivory | — |
| Heater Model | VMU-40-007EX(1200°C) | — |
| Rapid Cooling Unit | Not Installed | — |
| N2 Load Lock | Not Installed | — |
| O2 Analyzer | Not Installed | — |
| SMIF Maker/Model | Not Installed | — |
| AGV Compatibility | Unable | — |
| System Main Controller | WAVES | — |
| Mechanical Controller | WAVES | — |
| Sequenc Controller | WAVES | — |
| Gas Controller | WAVES | — |
| Gas Flow Chart Panel | Installed (Front, Rear) | — |
| Operation Panel | Installed (Front, Rear) | — |
| Signal Tower / Colors | Installed (3 COLORS) | — |
| Furnace Temperature Controller | Model 560A | — |
| Furnace Overtemp Detector | FENWAL/DMR-5FR | — |
| Vintage | 2006 | — |
| Wafer size | Wafer I Cassette Handling | — |
| Frequency | 50/60 HZ[1] | — |
| Power Consumption | 4.0 kVA[1] | — |
| Wafer Size | 8 inch[2] | — |
| Furnaces / Diffusion Vintage | 2006 | — |
| System Controller | TS-4000Z | — |
| Temperature Range | 960°C (max. 1025°C) | — |
| Front Surface Finish | White | — |
| Process Pressure | Atmospheric | — |
| Inner TC Type | In-line | — |
| Tube Seal | Lip Seal | — |
| Wafer Type | Notch | — |
| Stocker | 21 slot Carrier | — |
| Model | Alpha 8 SE[1] | — |
| Make | Tel[1] | — |
| Equipment type | Furnace[2] | — |
| Asset Number | — | 142841[9] |
| Last Confirm Date | — | October 14, 2025[10] |
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