Comparison ledger
Thermo Fisher 1300 Series Safety, YES R1, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | R1YES |
|---|---|---|
| OEM | Thermo Fisher | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | Legacy |
| Lifecycle milestones | 2026 Third-party support only | — |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher 1300 | YES R1 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Class II[2] | — |
| Cabinet type | Class II, Type A2 biological safety cabinet[3] | — |
| Airflow compensation | SmartFlow airflow compensation system[3] | — |
| Motors | Dual DC motors[3] | — |
| Front window design | SmartClean front window design[3] | — |
| Control panel | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[3] | — |
| UV light | Programmable UV light[3] | — |
| SmartPort | SmartPort convenience for routing tubing and cables through the side walls[3] | — |
| Available widths | 3-foot, 4-foot, 5-foot, and 6-foot sizes[3] | — |
| Front opening choices | 8-inch or 10-inch front opening[3] | — |
| Filter specification | H14 HEPA filters, EN 1822, 99.995% @ MPPS[4] | — |
| Certification | NSF/ANSI 49, UL, CE[4] | — |
| Service valves | Up to 6 total, 3 on each side wall[4] | — |
| Plasma clean benchmark | — | 5 minute Argon plasma clean[1] |
| Referenced use | — | Industry standard for 15 years[1] |
| Input power / rating | — | 120 V, 60 Hz, 1.4 A, 175 W[5] |
| Controller | — | Y.E.S. ‘Lark’ Logical Sequencer[5] |
| Plasma power source | — | Plasma-Therm PE-1000, ~1 kW, ~50 kHz, 115 VAC[5] |
| Matching network | — | Advanced Energy LM-5K manual transformer[5] |
| Vacuum pump | — | Fisher Scientific Maxima C Plus Model M2C, KF-16 inlet[5] |
| Process gases | — | Ar or O2[6] |
| Chamber temperature range | — | 25–80 °C (typical, from plasma heat)[6] |
| Maximum substrate size | — | 12 inch[6] |
| Sample size range | — | Small pieces up to 12 in x 12 in x 4 in[6] |
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