Comparison ledger
Thermo Fisher 1300 Series Safety, YES CV200 RFS, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | CV200 RFSYES |
|---|---|---|
| OEM | Thermo Fisher | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | 50mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 Third-party support only | — |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher 1300 | YES CV200 RFS |
| Specifications | ||
| Configuration | Class II[1] | — |
| Cabinet type | Class II, Type A2 biological safety cabinet[2] | — |
| Airflow compensation | SmartFlow airflow compensation system[2] | — |
| Motors | Dual DC motors[2] | — |
| Front window design | SmartClean front window design[2] | — |
| Control panel | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[2] | — |
| UV light | Programmable UV light[2] | — |
| SmartPort | SmartPort convenience for routing tubing and cables through the side walls[2] | — |
| Available widths | 3-foot, 4-foot, 5-foot, and 6-foot sizes[2] | — |
| Front opening choices | 8-inch or 10-inch front opening[2] | — |
| Filter specification | H14 HEPA filters, EN 1822, 99.995% @ MPPS[3] | — |
| Certification | NSF/ANSI 49, UL, CE[3] | — |
| Service valves | Up to 6 total, 3 on each side wall[3] | — |
| Process | — | Plasma strip / descum system[4] |
| Wafer size | — | 50 mm to 200 mm[4] |
| Power supply | — | Variable Power Supply from 150 W to 1250 W[4] |
| Resist removal rate | — | Up to 7000 angstroms per minute[4] |
| Temperature measurement | — | Real-time wafer temperature measurement[4] |
| Temperature control | — | Flexible temperature control[4] |
| Gas inputs | — | Multiple process gas inputs[4] |
| Design | — | Unique downstream protective design[4] |
| Wafer size range | — | 50 mm to 200 mm[4] |
| Power supply range | — | 150 W to 1250 W[4] |
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