Waferpedia

Comparison ledger

1300 Series Safetyversus500

Thermo Fisher 1300 Series Safety, YES 500, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1300 Series SafetyThermo Fisher
500YES
OEMThermo FisherYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2026 Third-party support only—
Control system——
Generation——
FamilyThermo Fisher 1300YES 500
Cited variants—
Specifications
ConfigurationClass II[2]—
Cabinet typeClass II, Type A2 biological safety cabinet[3]—
Airflow compensationSmartFlow airflow compensation system[3]—
MotorsDual DC motors[3]—
Front window designSmartClean front window design[3]—
Control panelIntuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[3]—
UV lightProgrammable UV light[3]—
SmartPortSmartPort convenience for routing tubing and cables through the side walls[3]—
Available widths3-foot, 4-foot, 5-foot, and 6-foot sizes[3]—
Front opening choices8-inch or 10-inch front opening[3]—
Filter specificationH14 HEPA filters, EN 1822, 99.995% @ MPPS[4]—
CertificationNSF/ANSI 49, UL, CE[4]—
Service valvesUp to 6 total, 3 on each side wall[4]—
System name—IL 500 AUTO In-Line Plasma System[1]
Loading—Robotically loaded[1]
Automation—Fully automatic[1]
Integration—Designed to integrate into any commercially available automated bonding system[1]
Protocol—SMEMA protocol[1]
Supported products—Lead frames, boats, or substrate/PCB products[1]
Clean handling feature—Special captive magazine (CLEANMAG) that is snap-loaded into a quick-change, self-aligning base assembly[1]
Contamination control—All moving parts and robotics are mounted external to the chamber[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]thermofisher.comthermofisher.com
  4. [4]documents.thermofisher.comdocuments.thermofisher.com