Comparison ledger
Thermo Fisher 1300 Series Safety, Veeco Waferstorm 3300 M 3303 M 3304 Single Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | |
|---|---|---|
| OEM | Thermo Fisher | Veeco |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 Third-party support only | — |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher 1300 | Veeco Waferstorm |
| Specifications | ||
| Configuration | Class II[1] | 40 A[5] |
| Cabinet type | Class II, Type A2 biological safety cabinet[2] | — |
| Airflow compensation | SmartFlow airflow compensation system[2] | — |
| Motors | Dual DC motors[2] | — |
| Front window design | SmartClean front window design[2] | — |
| Control panel | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[2] | — |
| UV light | Programmable UV light[2] | — |
| SmartPort | SmartPort convenience for routing tubing and cables through the side walls[2] | — |
| Available widths | 3-foot, 4-foot, 5-foot, and 6-foot sizes[2] | — |
| Front opening choices | 8-inch or 10-inch front opening[2] | — |
| Filter specification | H14 HEPA filters, EN 1822, 99.995% @ MPPS[3] | — |
| Certification | NSF/ANSI 49, UL, CE[3] | — |
| Service valves | Up to 6 total, 3 on each side wall[3] | — |
| Voltage | — | 208 VAC[4] |
| Phase | — | 3 Phase[4] |
| Frequency | — | 60 Hz[4] |
| Manufacturer | — | Veeco / SSEC[5] |
| Model | — | Waferstorm M 3303[5] |
| Model designation | — | Waferstorm 3300 / M 3303 / M 3304[4] |
| Equipment type | — | single wafer processing system[4] |
| Process category | — | Wet Processing / Clean[4] |
| Wafer size | — | 6 inch[5] |
| Current | — | 40 A[5] |
| Configured for | — | 150mm SSEC/Veeco M3303 solvent (NMP) liftoff system[6] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →