Comparison ledger
Thermo Fisher 1300 Series Safety, Tokyo Electron NS 300 + Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | NS 300 + WaferTokyo Electron |
|---|---|---|
| OEM | Thermo Fisher | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | 8" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 Third-party support only | — |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher 1300 | Tokyo Electron NS 300 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Class II[2] | 8 chambers[1] |
| Cabinet type | Class II, Type A2 biological safety cabinet[3] | — |
| Airflow compensation | SmartFlow airflow compensation system[3] | — |
| Motors | Dual DC motors[3] | — |
| Front window design | SmartClean front window design[3] | — |
| Control panel | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[3] | — |
| UV light | Programmable UV light[3] | — |
| SmartPort | SmartPort convenience for routing tubing and cables through the side walls[3] | — |
| Available widths | 3-foot, 4-foot, 5-foot, and 6-foot sizes[3] | — |
| Front opening choices | 8-inch or 10-inch front opening[3] | — |
| Filter specification | H14 HEPA filters, EN 1822, 99.995% @ MPPS[4] | — |
| Certification | NSF/ANSI 49, UL, CE[4] | — |
| Service valves | Up to 6 total, 3 on each side wall[4] | — |
| Wafer size | — | 8" wafer[1] |
| Phase | — | 1 phase[1] |
| Chemicals | — | TMY[1] |
| FOUP | — | 4[1] |
| Power supply | — | Tel NSPB-E075-Y[1] |
| Process Type | — | Wet process[1] |
| Wafer Size | — | 8 inch[1] |
| Number of Chambers | — | 8[1] |
| FOUP Capacity | — | 4[1] |
| Power Supply Model | — | Tel NSPB-E075-Y[1] |
| Phase (NS 300+) | — | 1 phase[1] |
| Phase (NS 300) | — | 3 phase[6] |
| Frequency (NS 300) | — | 50/60Hz[6] |
| OEM | — | Tokyo Electron[1] |
| Model | — | NS 300 +[1] |
| Tool type | — | Wafer Scrubber[1] |
| Chambers | — | 8 chambers[1] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →