Comparison ledger
SUSS MicroTec MA 150 CC Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MA 150 CC MaskSUSS MicroTec | 1000 FamilyUltratech |
|---|---|---|
| OEM | SUSS MicroTec | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec MA 150 | Ultratech 1000 Family |
| Specifications | ||
| Configuration | Topside Alignment[1] | — |
| Max Wafer Size | 6"/150mm Wafer Capable[1] | — |
| Make | SUSS[1] | — |
| Model | MA 150 CC[1] | — |
| Tool type | Mask Aligner[1] | Photolithography step-and-repeat 1X stepper[2] |
| Wafer sizes | 2, 3, 4, 5, 6 inch[1] | — |
| Topside alignment | Supported[1] | — |
| Operation mode | Automatic or manual mode[1] | — |
| Alignment | Automatic alignment[1] | — |
| Prealigner | Optical prealigner[1] | — |
| Lamp house | 1000 Watt lamphouse[1] | — |
| Optics | UV400 optics for 365nm and 405nm exposure[1] | — |
| Front lens | UV400 front lens[1] | — |
| Lamp power supply | Suss CIC 1000 Lamp Power Supply[1] | — |
| Microscope | Suss DVM 6 Microscope[1] | — |
| Camera | CCD camera right and left[1] | — |
| Contact exposure modes | Hard, soft, and vacuum contact exposure modes[1] | — |
| Display | Flat panel touchscreen[1] | — |
| Documentation | Operations manual[1] | — |
| Optical design | — | Wynne Dyson[2] |
| Magnification | — | 1X[2] |
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