Comparison ledger
SUSS MicroTec ACS 200 +, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ACS 200 +SUSS MicroTec | 1000 FamilyUltratech |
|---|---|---|
| OEM | SUSS MicroTec | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec ACS 200 | Ultratech 1000 Family |
| Cited variants |
| — |
| Specifications | ||
| Voltage | 400 V[1] | — |
| Phase | 3 Phase[1] | — |
| Frequency | 60 Hz[1] | — |
| Configuration | With Gencobot 7S / 3L Transfer Robot[1] | — |
| OEM | SUSS MicroTec[1] | — |
| Model | ACS 200 +[1] | — |
| Wafer Sizes | 6 inch[1] | — |
| Vintage | 2007[1] | — |
| Transfer Robot | Gencobot 7S / 3L[1] | — |
| Developer Module | nDeveloper Module[1] | — |
| Solvent Developer Module | Yes[1] | — |
| Coater Module | Yes[1] | — |
| Thermal Module | 2 hotplates, 1 chillplate[1] | — |
| Controller | Kontron[1] | — |
| Media Storage Tanks | 4[1] | — |
| Media Control Box | SUSS[1] | — |
| Recirculating Chillers | Julabo F30-CL (2), Julabo FC 600 S (2)[1] | — |
| Power Requirements | 400 V, 3 Phase, 60 Hz[1] | — |
| Manufacturer | SUSS[1] | — |
| Equipment type | Coater / Developer[1] | — |
| Developer module type | Solvent developer module[1] | — |
| Coater module | Coater module[1] | — |
| Thermal module | Thermal module with 2 hotplates (1 ea chillplate)[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[2] |
| Optical design | — | Wynne Dyson[2] |
| Magnification | — | 1X[2] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →