Waferpedia

Comparison ledger

100R16versusTenuPol-5

Strasbaugh 100R16, Struers TenuPol-5, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
100R16Strasbaugh
TenuPol-5Struers
OEMStrasbaughStruers
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyStrasbaugh 100R16Struers TenuPol-5
Specifications
type1 spindle grinder/polisher[1]—
drive systemDC drive system with 2 motors[1]—
spindle RPM1-180 RPM[1]—
eccentric RPM1-90 RPM[1]—
controlsdigital timer; air down switch; spindle and eccentric speed dials; air regulators[1]—
capacity16 inches[1]—
spindle size1-8 TPI[1]—
overall dimensions28 inches x 36 inches x 48 inches[1]—
weight500 lbs[1]—
originmade in the USA[1]—
Equipment type—Electropolishing[2]
Function—Prepares TEM sections of electrically conductive materials through electrolytical thinning[2]
Polishing voltage range—0-100 V (0.1 V steps)[3]
Polishing current—2.5 A[3]
Electrolyte container capacity—approximately 1 liter[4]
Recommended electrolyte temperature range—-50°C to +45°C (-58°F to +113°F)[4]
Pump flow rate range—0-50 (arbitrary units)[4]
Specimen disc diameters (pre-thinning)—10 mm[4]
Specimen disc diameters (final thinning)—3 mm[4]
Light stop detection—Auto or ignore[4]
Flow modes—Single flow, Dual flow step, Dual flow ramp[4]
Output voltage (polishing)—0-100 V (0.1 V steps)[3]
Output current (polishing)—2.5 A[3]
Width—270 mm (10.6")[3]
Depth—180 mm (7.1")[3]
Height—276 mm (10.9")[3]
Weight—3.8 kg (8.4 lbs)[3]
Operating temperature—5-40°C (41-104°F)[3]
Operating humidity—0-95 % RH non-condensing[3]
Storage temperature—-25-55°C (13-113°F)[3]
Storage humidity—0-95 % RH non-condensing[3]
Noise level—LpA = 55.4 dB(A) (measured value), Uncertainty K = 4 dB[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]excelltechnology.comexcelltechnology.com
  2. [2]snsf.stanford.edusnsf.stanford.edu
  3. [3]webshopcms.struers.comwebshopcms.struers.com
  4. [4]manualslib.commanualslib.com